I-wafer yenziwe nge-silicon ecocekileyo (Si).Ngokuqhelekileyo yahlulwe kwii-intshi ezi-6, i-8-intshi, kunye ne-12-intshi yenkcazo, i-wafer iveliswa ngokusekelwe kwesi siqhekeza.Iziqwenga ze-silicon ezilungiselelwe ukusuka kwii-semiconductors ezicoceke kakhulu ngokusebenzisa iinkqubo ezinje ngokutsalwa kwekristale kunye nokusika kubizwa ngokuba zii-wafers beca.sebenzisa zingqukuva ngokwemilo.Izakhelo ezahlukeneyo zesekethe zinokusetyenzwa kwii-silicon wafers ukuba zibe yimveliso eneempawu ezithile zombane.iimveliso zesekethe ezisebenzayo ezidibeneyo.Ii-Wafers zihamba kuthotho lweenkqubo zokwenziwa kwe-semiconductor zenza izakhelo zesekethe ezincinci kakhulu, kwaye emva koko zisikwe, zipakishwe, kwaye zivavanywe kwiichips, ezisetyenziswa ngokubanzi kwizixhobo ezahlukeneyo zombane.Izixhobo ze-Wafer ziye zafumana ngaphezulu kweminyaka engama-60 yendaleko yetekhnoloji kunye nophuhliso lwamashishini, zenza imeko yoshishino elawulwa yi-silicon kwaye yongezwa ngezinto ezintsha ze-semiconductor.
I-80% yeefowuni eziphathwayo zehlabathi kunye neekhompyuter ziveliswa eTshayina.I-China ixhomekeke ekuthengisweni kwemveliso kumazwe angaphandle nge-95% yeetshiphusi zayo ezisebenza kakhulu, ngoko ke i-China ichitha i-US$220 yebhiliyoni minyaka le ukungenisa iitshiphusi, nto leyo ephinda kabini ukuthengwa kwe-oyile yonyaka eTshayina.Zonke izixhobo kunye nezixhobo ezinxulumene noomatshini be-photolithography kunye nokuveliswa kwe-chip nazo zivaliwe, njengama-wafers, iintsimbi ezicocekileyo, ii-etching machines, njl.
Namhlanje siza kuthetha ngokufutshane malunga nomgaqo wokucima ukukhanya kwe-UV koomatshini be-wafer.Xa ubhala idatha, kuyimfuneko ukufaka intlawulo kwisango elidadayo ngokufaka i-VPP ephezulu yombane esangweni, njengoko kuboniswe kumzobo ongezantsi.Ekubeni intlawulo ejojowe ingenawo amandla okungena eludongeni lwamandla efilimu ye-silicon oxide, inokugcina kuphela isimo se-quo, ngoko ke kufuneka sinikeze umrhumo umlinganiselo othile wamandla!Oku kuxa ukukhanya kwe-ultraviolet kuyadingeka.
Xa isango elidadayo lifumana imisebe ye-ultraviolet, ii-electron ezikwisango elidadayo zifumana amandla okukhanya kwe-ultraviolet quanta, kwaye ii-electron ziba zii-electron ezishushu ezinamandla okugqobhoza kudonga lwamandla lwefilimu yesilicon oxide.Njengoko kuboniswe kumzobo, ii-electron ezishushu zingena kwifilimu ye-silicon oxide, zigeleza kwi-substrate kunye nesango, kwaye zibuyele kwimeko yokucima.Umsebenzi wokucima unokwenziwa kuphela ngokufumana i-ultraviolet irradiation, kwaye ayikwazi ukucinywa ngekhompyutha.Ngamanye amazwi, inani lamasuntswana lingatshintshwa kuphela ukusuka ku "1" ukuya ku "0", kwaye kwelinye icala.Ayikho enye indlela ngaphandle kokucima yonke imixholo yetshiphu.
Siyazi ukuba amandla okukhanya ahambelana ngokungafaniyo nobude bokukhanya.Ukuze ii-electron zibe yi-electron eshushu kwaye ngaloo ndlela zibe namandla okungena kwifilimu ye-oxide, ukukhanya kokukhanya kunye ne-wavelength emfutshane, oko kukuthi, imitha ye-ultraviolet, ifuneka kakhulu.Ekubeni ixesha lokucima lixhomekeke kwinani leefotoni, ixesha lokucima alinakucuthwa nakumaza amafutshane.Ngokubanzi, ukucima kuqala xa iwavelength iku-4000A (400nm).Ngokusisiseko ifikelela kwi-saturation malunga ne-3000A.Ngaphantsi kwe-3000A, nokuba ubude be-waveleng bufutshane, abuyi kuba nayiphi na impembelelo kwixesha lokucima.
Umgangatho wokucinywa kwe-UV kukwamkela imitha ye-ultraviolet enobude obuchanekileyo obuyi-253.7nm kunye nobunzulu be-≥16000 μ W/cm².Umsebenzi wokucima unokugqitywa ngexesha lokuvezwa ukusuka kwimizuzu engama-30 ukuya kwiiyure ze-3.
Ixesha lokuposa: Dec-22-2023